Cleaning the maf can cause premature failure of it. However if it did it before and after that wasn't your problem. Everything else being replaced SHOULD eliminate them as well but don't count them out just yet, I've seen new parts fail right out of the box. However again if it did it before and after I'd be looking at other possibilities before throwing more parts at it.
What kind of vacuum does it pull at idle? Have you had the vac system smoke tested to look for leaks? Are there any check lights on and/or does the vehicle have any codes?